Product Guide - SDL Series - Product Summary
Higher pumping speed.
Support larger dilameter wafer, larger FPD substrate and Solar applications.
Higher pumping speed minimizes the tact time for large load lock chamber.
- Maximized the pumping speed in the atmospheric side to achieve higher throughput.
- The combination with large booster pump allows higher pumping speed up to 55,000L/min.
Specification Table
| Specification \ Model | SD220L | SDL25K | SDL40K | SDL60K |
|---|---|---|---|---|
| Maximum Pumping Speed (L/min) (Upper 50Hz / Lower 60Hz) | 3,100 3,700 | 25,000 | 40,000 | 55,000 |
| Ultimate Pressure (Pa) | 4/3 | 0.5 | ||
| Maximum Inlet Pressure (Pa) | Atmospheric pressure | |||
| Inlet Flange | NW50 | NW100 | NW160 | |
| Outlet Flange | NW40 | NW50 | ||
| Weight(Approx.) (kg) | 450 | 620 | 750 | 910 |
| Electric Power Supply | 3 phase AC200 50/60Hz AC220V 60Hz | 3 phase AC200-220V 50/60Hz | ||
| Power in normal operation (kW) | 5.0 | 6.9 | 7.0 | 7.4 |
| Electric Power Capacity (kVA) | 8.3 | 17.0 | 23.6 | 28.1 |
| Cooling Water Supply | 5L/min and over | 6L/min and over | ||
| Purge N2 Gas Supply | 0-50SLM | |||
Pumping Curve(SP)
Pump Schematics (SD220L)
Pump Schematics (SDL25K)
Pump Schematics (SDL40K)
Pump Schematics (SDL60K)
- Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
- Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.
mail address for inquiries: sales@kashiyama.com
