Products

Dry Vacuum Pump Products


Best renowned for its vertical screw pumping technology, with improved energy-saving structure, SDE series offers unrivaled reliability and productivity in harsh applications. Designed for on board installation, MU series offers powerful pumping performance from small footprint requiring only 400 watts (MU100X) at vacuum. SDL series offers high pumping speed from atmosphere, achieving high throughput for large load lock and FPD applications.

Please contact us at the following for more information regarding Kashiyama dry vacuum pump products.