Product Guide
NeoDry 36
Air Cooled, Point of Use Dry Pump.
Lower COO by virtue of extended MTBR.
3 year routine maintenance recommended.
Replacement for messy Scroll and Rotary vane pumps.
MU Series
The world smallest and least power consumption.
The pump can be integrated into any equipment easily.
SDE Series
Dry pumps reliable for all applications.
Energy-saving features combined with the reliability, SDE Series achieved lower running cost.
SDL Series
Higher pumping speed.
Support larger diameter wafer, larger FPD substrate and Solar applications.
Higher pumping speed minimizes the tact time for large load lock chamber.
KMB Series
Can be used in combination with the dry pumps to enhance pumping capacity.
Rotational speed control enables operation from atmospheric pressure.
- Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
- Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.
mail address for inquiries: sales@kashiyama.co.jp
