Product Guide & Series List

Select a Right Pump for the Application

Harsh Duty Process Application

SDE-TX, SDE-X & SDE Series

The Durable, Long Lasting Dry Vacuum Pump for any Process Application. SDE-TX series for Harsh Process, Energy Efficient SDE-X series & SDE series for Large Pumping Capacity.

Light Process
Application

MU-X & MU-P/H Series

The Industry's Smallest Pump with the lowest power consumption. On Board Pump, Ideal for Installing in any Tools.

Large Pumping Performance

SDE & SDL Series

Large Pumping Capability for Increased Wafer and FPD Substrate Sizes. SDE Series for Harsh Duty Application & SDL series for Lock application.

General Industry

NeoDry Series

Air Cooled Vacuum Pump for Low Cost of Ownership, Long Life & Maintenance Cycle. Fit right in for Industrial Application such as Analytical, R&D Laboratory Equipment.

Select a Right Pump for the Performance

SDE & SDL Series

SDE & SDL Series Max. Pumping Speed

NeoDry Series

NeoDry Series Max. Pumping Speed

Series List

SDE-TX Series SDE Series Focused on Harsh Process Durability

SDE-TX
Model Max pumping speed (L/min) Ultimate pressure (Pa)
SDE120TX 1,500 1.3
SDE303TX 5,000 0.5
SDE603TX 10,000 0.5
SDE1203TX 20,000 0.5
SDE20M12TX 30,000 0.5
SDE30M12TX 45,000 0.5

SDE-X Series Energy saving and Process Durability

SDE-X
Model Max pumping speed (L/min) Ultimate pressure (Pa)
SDE90X 1,300 1.3
SDE303X 5,000 0.5
SDE603X 10,000 0.5
SDE1203X 20,000 0.5
SDE20M09X 30,000 0.5
SDE30M09X 45,000 0.5

SDE Series Standard type for harsh process

SDE
Model Max pumping speed (L/min) Ultimate pressure (Pa)
SDE1220 20,000 0.5
SDE20M20 30,000 0.5
SDE30M20 50,000 0.5
SDE4060 60,000 0.8
SDE4030M20 80,000 0.5
SDE8060 120,000 0.8
SDE804060 190,000 0.5

SDL Series

SDL
Model Max pumping speed (L/min) Ultimate pressure (Pa)
SDL12E50 25,000 0.8
SDL20E50 50,000 0.8
SDL36M60 60,000 0.5
SDL40E60 70,000 0.8
SDL40E201 80,000 5.0
SDL40EW201 150,000 5.0
SDL80201 170,000 5.0

MU-X Series Power Consumption 0.35kW, Extreamly Small Footprint

MU-X
Model Max pumping speed (L/min) Ultimate pressure (Pa)
MU100X 1,660 1.5
MU180X 3,000 1.5
MU300X 5,000 0.5
MU600X 10,000 0.5
MU1200X 20,000 0.5
MU20M18X 30,000 0.5

MU-P/H Series Process Durability, Power Consumption 0.7kW

MU-P
Model Max pumping speed (L/min) Ultimate pressure (Pa)
MU100P/H 1,660 3.0
MU180P/H 3,000 5.0
MU300P/H 5,000 0.5
MU600P/H 10,000 0.5
MU1200P/H 20,000 0.5
MU20M18P/H 30,000 0.5

NeoDry Series Handy & Air Cooled Dry Pump

NeoDry
Model Max pumping speed (L/min) Ultimate pressure (Pa)
NeoDry7E 110 5.0
NeoDry15E 250 1.0
NeoDry30E 500 1.0
NeoDry36E 600 1.0
NeoDry60E 1,000 1.0
NeoDry300E 5,000 0.3

Spec. & name of products are subject to change without prior notice.