Product Guide & Series List

Select a Right Pump for the Application

Harsh Duty Process Application

SDE Series

The Durable, Long Lasting Dry Vacuum Pump for any Process Application.

Light Process
Application

MU-X & MU-P/H Series

The Industry's Smallest Pump with the lowest power consumption. On Board Pump, Ideal for Installing in any Tools.

Large
Pumping Performance

SDE & SDL Series

Large Pumping Capability for Increased Wafer and FPD Substrate Sizes. SDE Series for Harsh Duty Application & SDL series for Lock application.

General Industry

NeoDry Series

Air Cooled Vacuum Pump for Low Cost of Ownership, Long Life & Maintenance Cycle. Fit right in for Industrial Application such as Analytical, R&D Laboratory Equipment.

Select a Right Pump for the Performance

SDE Series

SDE Series Max. Pumping Speed

SDL Series

SDE Series Max. Pumping Speed

NeoDry Series

NeoDry Series Max. Pumping Speed

Series List

SDE Series For Harsh Process, Energy Saver, and Large Capacity

SDE
Model Max pumping speed (L/min) Ultimate pressure (Pa)
SDE90X 1,300 1.3
SDE120TX 1,500 1.3
SDE200 3,300 1.3
SDE303X 5,000 0.5
SDE603X 10,000 0.5
SDE1203TX 20,000 0.5
SDE20N12TX 30,000 0.5
SDE30N20 50,000 0.5
SDE60N20 100,000 0.5

SDL Series

SDL
Model Max pumping speed (L/min) Ultimate pressure (Pa)
SDL12E50/60 25,000 0.8
SDL20E60 40,000 0.8
SDL36E60 60,000 0.8

MU-X Series Power Consumption 0.35kW, Extreamly Small Footprint

MU-X
Model Max pumping speed (L/min) Ultimate pressure (Pa)
MU100X 1,660 1.5
MU180X 3,000 1.5
MU300X 5,000 0.5
MU600X 10,000 0.5
MU1218X 20,000 0.5
MU20N18X 30,000 0.5

MU-P/H Series Process Durability, Power Consumption 0.7kW

MU-P
Model Max pumping speed (L/min) Ultimate pressure (Pa)
MU100P/H 1,660 3.0
MU180P/H 3,000 5.0
MU300P/H 5,000 0.5
MU600P/H 10,000 0.5
MU1218P/H 20,000 0.5
MU20N18P/H 30,000 0.5
MU30N18P/H 50,000 0.5

NeoDry Series Handy & Air Cooled Dry Pump

NeoDry
Model Max pumping speed (L/min) Ultimate pressure (Pa)
NeoDry7E 110 5.0
NeoDry15E 250 1.0
NeoDry30E 500 1.0
NeoDry36E 600 1.0
NeoDry60E 1,000 1.0
NeoDry300E 5,000 0.3

Spec. & name of products are subject to change without prior notice.