-2 Remarkable Solutions- MU-X Series

Power Consumption 0.35kW. Extreamly Small Footprint. Roots dry pump achieved smallest energy consumption & footprint in the category. Applicable 02 for various tools. Best for clean pumping such as L/L and transfer chamber, etc.

Major Products

Spec. / Products MU100XMU180XMU300XMU600XMU1218XMU20N18X
Max. pumping speed
[L/min] *1
1,6603,0005,00010,00020,00030,000
Ultimate pressure
[Pa] *1
1.50.5
Supply voltage
(50/60Hz)
3Phase AC200~220V *2
Power consumption
[kW] *3
0.350.50.550.60.91.0
Dimensions [mm] L×W×H *4450×230×275550×280×299450×230×520530×230×520870×380×7511000×450×950
Mass [kg]6095100120270410

*1) Without N2 purge. *2) Contact us for other voltage options. *3) Approx. value at ultimate pressure. *4) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.

S-P Curve

S-P Curve

  1. Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.

mail address for inquiries: sales@kashiyama.com