SDL Series


Available to large size wafer & FPD

Large capacity available
by combination.
Larger than 150kL/min
also available on demand.


Shorter cycle-time

Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber.

SDL Series

Pumps for solvent evacuation are also lined-up

Major Products

Spec. / Products SDL12E50SDL20E50SDL36M60SDL40E60SDL40E201SDL40EW201SDL80201
Max. pumping speed
[L/min] *1
Ultimate pressure
[Pa] *1
Supply voltage
3Phase AC200~220V, 380~480V3Phase AC380~440V

*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.

S-P Curve

S-P Curve

* S-P curves vary by combination.

  1. Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.

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