
Harsh Process Application Example

Lineup by Max. Pumping Speed
Max. Pumping Speed[L/min]
Major Products
Spec. / Products | SDE90X | SDE120TX | SDE200 | SDE303X/TX | SDE603X/TX | SDE1203X/TX | |
Max. pumping speed [L/min] *1 *4 | 1,300 | 1,500 | 3,300 | 5,000 | 10,000 | 20,000 | |
Ultimate pressure [Pa] *1 | 1.3 | 0.5 | |||||
Supply voltage (50/60Hz) | 3Phase AC200~220V *5 | ||||||
Power consumption [kW]*2 | 1.3 | 2.8 | 2.7 | 1.5/3.0 | 1.6/3.1 | 2.0/3.2 | |
Dimensions [mm]*3 | L | 690 | 930 | 760 | 900 | ||
W | 370 | 400 | 400 | ||||
H | 501 | 500 | 905 |
*1) Data without heater nor N2 purge *2) Approx. value at ultimate pressure. *3) Package size.
*4) The maximum pumping speed is an approximate value. *5) Contact us for other volotage options. *Contact us about applicable gas.
S-P Curve
Option

PDF Document
- Specifications and model names are subject to change without prior notice.
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