Standard type for harsh process
Available up to
large wafer and FPD.
|Spec. / Products *1||SDE1220||SDE20M20||SDE30M20||SDE4060||SDE4030M20||SDE8060||SDE804060|
|Max. pumping speed|
|3Phase AC200～220V, 380～480V|
*1) Smaller than 20,000L/min pumps are also available. *2) Without N2 purge.
*3) Package size. Dimensions vary by specification.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
*S-P curves vary by combination.
- Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
- Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.