Process Durability / Energy-Saving / High Capacity SDE Series

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

Harsh Process Application Example

Lineup by Max. Pumping Speed

Lineup by Pumping Speed
Max. Pumping Speed[L/min]

Major Products

Spec. / ProductsSDE90XSDE120TXSDE200SDE303X/TXSDE603X/TXSDE1203X/TX
Max. pumping speed
[L/min] *1 *4		1,3001,5003,3005,00010,00020,000
Ultimate pressure
[Pa] *1		1.30.5
Supply voltage
(50/60Hz)		3Phase AC200～220V *5
Power consumption [kW]*21.32.82.71.5/3.01.6/3.12.0/3.2
Dimensions [mm]*3L690930760900
W370400400
H501500905

*1) Data without heater nor N2 purge　*2) Approx. value at ultimate pressure.　*3) Package size.
*4) The maximum pumping speed is an approximate value.　*5) Contact us for other volotage options.　*Contact us about applicable gas.

S-P Curve

S-P Curve

Option

Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).

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  1. Specifications and model names are subject to change without prior notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign and Foreign Trade Control Act. Before placing an export order, please contact our Sales Department.