SDL Series

Available to large size wafer & FPD. Large capacity available by combination. Larger than 150kL/min also available on demand. Shorter cycle-time. Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber.

Pumps for solvent evacuation are also lined-up

Major Products

Spec. / Products SDL12E50SDL20E50SDL36E60SDL3600
Max. pumping speed [L/min] *125,00040,00060,00060,000
Back pump max. pumping speed [L/min] *18,0008,00010,00012,500
Ultimate pressure [Pa] *10.8
Supply voltage (50/60Hz)3Ph AC200~220V, 380~440V
Dimensions [mm] L×W×H1000×520×10501370×850×12951370×600×1295
Mass [kg]645800920950

*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Other pump models may be considered depending on the configuration. Please contact our sales representative for details.

S-P Curve

S-P Curve

* S-P curves vary by combination.

PDF Document

  1. Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.

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