Available to large size wafer & FPD
Large capacity available
Larger than 150kL/min
also available on demand.
Large capacity around atm. pressure can achieve high speed pumping best for large L/L chamber.
Pumps for solvent evacuation are also lined-up
|Spec. / Products||SDL12E50||SDL20E50||SDL36M60||SDL40E60||SDL40E201||SDL40EW201||SDL80201|
|Max. pumping speed|
|3Phase AC200～220V, 380～480V||3Phase AC380～440V|
*1) Without N2 purge.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* S-P curves vary by combination.
- Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
- Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.