Large Capacity SDE Series

Standard type for harsh process

01
FEATURE

Available up to
200kL/min.

02
FEATURE

Best for
large wafer and FPD.

03
FEATURE

Durable to
various processes.

SDE Series

Major Products

Spec. / Products *1SDE1220SDE20M20SDE30M20SDE4060SDE4030M20SDE8060SDE804060
Max. pumping speed
[L/min] *2
20,00030,00050,00060,00080,000120,000190,000
Ultimate pressure
[Pa] *2
0.50.80.50.80.5
Supply voltage
(50/60Hz)
3Phase AC200~220V, 380~480V
Dimensions [mm]
W*H*L *3
W:400
H:780
L:930
W:450
H:950
L:1000
W:450
H:950
L:1000
W:750
H:1200
L:1600
W:800
H:1580
L:1320
W:850
H:1220
L:1600
W:1000
H:1980
L:1850

*1) Smaller than 20,000L/min pumps are also available.  *2) Without N2 purge.
*3) Package size. Dimensions vary by specification.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.

S-P Curve

S-P Curve

*S-P curves vary by combination.

  1. Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.

mail address for inquiries: sales@kashiyama.co.jp