Power Consumption 0.35kWExtreamly Small Footprint
Roots dry pump achieved smallest energy consumption & footprint in the category.
Applicable for various tools.
Best for clean pumping such as L/L
and transfer chamber, etc.
|Spec. / Products||MU100X||MU180X||MU300X||MU600X||MU1200X||MU20M18X|
|Max. pumping speed|
|3Phase AC200～220V *2|
*1) Without N2 purge. *2) Contact us for other voltage options. *3) Approx. value at ultimate pressure. *4) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice.
* Contact us about large capacity pumps.
- Because we are constantly working to improve performance and upgrade our products, specifications and diagrammatic representations in this catalog may change without notice.
- Products displayed in this catalog must be approved for export in accordance with the Foreign Exchange and Foreign Trade Control Act. Before placing an export order, please contact our Business Department.