-2 Remarkable Solutions- MU-XE Series

Power Consumption 0.35kW. Extreamly Small Footprint. Roots dry pump achieved smallest energy consumption & footprint in the category. Applicable 02 for various tools. Best for clean pumping such as L/L and transfer chamber, etc.

Major Products

Spec. / Products MU100XEMU180XMU300XEMU600XEMU1200XE
Max. pumping speed
[L/min] *1 *5		1,6603,0005,00010,00020,000
Ultimate pressure
[Pa] *1		1.50.5
Supply voltage
(50/60Hz)		3Phase AC200～220V *2
Power consumption
[kW] *3		0.250.50.450.50.6
Dimensions [mm] L×W×H *4450×230×275550×280×299450×230×520530×230×520625×275×580
Mass [kg]6095100120165

*1) Data without N2 purge. *2) Contact us for other voltage options. *3) Approx. value at ultimate pressure. *4) Package size.
*5) The maximum pumping speed is an approximate value. *Contact us about large capacity pumps.

S-P Curve

S-P Curve

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  1. Specifications and model names are subject to change without prior notice.
  2. Products displayed in this catalog must be approved for export in accordance with the Foreign and Foreign Trade Control Act. Before placing an export order, please contact our Sales Department.